Phase formation and diffusion after nitrogen PIII in molybdenum

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 1238-1242

  Mandl S ^a   Gerlach, J W ^a   Assmann, W ^b   Rauschenbach, B ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

Author keywords

Elastic recoil detection analysis; Molybdenum; Nitriding; PIII

Indexed keywords

ION IMPLANTATION; PHASE CONTROL; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

PHASE FORMATION;

MOLYBDENUM;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 17644380399     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00457-2     Document Type: Article

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