In-situ monitoring of the electronic properties and growth evolution of TiN films

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 421-424

  Patsalas, P ^a   Logothetidis, S ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Ellipsometry; Grain growth; Reactive sputtering; Resistivity; Titanium nitride

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC CONDUCTIVITY; ELLIPSOMETRY; FILM GROWTH; IRRADIATION; MICROSTRUCTURE;

SPECTROSCOPIC ELLIPSOMETRY (SE);

TITANIUM NITRIDE;

COATING;

EID: 16744364359     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.123     Document Type: Article

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