Room temperature deposition of thin-film indium-tin oxide on micro-fabricated color filters and its application to flat-panel displays

Guangdianzi Jiguang/Journal of Optoelectronics Laser

Volumn 16, Issue 2, 2005, Pages 140-145

  Meng, Zhi Guo ^a   Peng, Hua Jun ^b   Wu, Chun Ya ^a   Li, Juan ^a   Xiong, Shao Zhen ^a   Qiu, Cheng Feng ^b   Li, Juan Juan ^b   Wang, Wen ^b   Guo, Hai Cheng ^b  

^a NANKAI UNIVERSITY   (China)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Color filter (CF); Indium tin oxide (ITO) transparent conductive thin film; Lift off micro pattern method; Liquid crystal display (LCD); Organic light emitting display (OLED); Room temperature DC magnetron sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY OF SOLIDS; INDIUM COMPOUNDS; LIGHT TRANSMISSION; LIQUID CRYSTAL DISPLAYS; MAGNETRON SPUTTERING; MICROSTRUCTURE; OPTICAL FILMS; X RAY DIFFRACTION;

COLOR FILTER; INDIUM-TIN OXIDE TRANSPARENT CONDUCTIVE THIN FILM; LIFT-OFF MICRO-PATTERN METHOD; ORGANIC LIGHT EMITTING DISPLAY; ROOM TEMPERATURE DC MAGNETRON SPUTTERING;

FLAT PANEL DISPLAYS;

EID: 16644391936     PISSN: 10050086     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

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