Photoelectron spectroscopy of ultrathin yttrium oxide films on Si(1 0 0)

Microelectronic Engineering

Volumn 72, Issue 1-4, 2004, Pages 154-159

  Ohta, A ^a   Yamaoka, M ^a   Miyazaki, S ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Energy band alignment; Energy loss spectrum; Photoemission; Valence band spectrum; X ray photoelectron spectroscopy; Yttrium oxide

Indexed keywords

BAND STRUCTURE; HEAT CONDUCTION; INTERFACES (MATERIALS); MATHEMATICAL MODELS; MOSFET DEVICES; PHOTOEMISSION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY; YTTRIUM COMPOUNDS;

ENERGY BAND ALIGNMENT; ENERGY LOSS SPECTRUM; VALENCE BAND SPECTRUM; YTTRIUM OXIDE;

SEMICONDUCTING SILICON;

EID: 1642603312     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2003.12.030     Document Type: Conference Paper

References (11)

1. Green M.L., Gusev E.P., Degraeve R., Garfunkel E.L. J. Appl. Phys. 90:2001;2057.
2. Wilk G.D., Wallace R.M., Anthony J.M. J. Appl. Phys. 89:2001;5243.
3. Miyazaki S. J. Vac. Sci. Technol. B19:2001;2212.
4. Miyazaki S., Narasaki N., Ogasawara M., Hirose M. Microelec. Eng. 59:2001;373.
5. M. Yamaoka, M. Narasaki, H. Murakami, S. Miyazaki, in: Proceedings of the 2nd Electrochemical Society of International Semiconducting Technology Conference, Tokyo, 2002, p. 229.
6. Hubbard K.J., Schlom D.G. J. Mater. Res. 11:1996;2757.
7. Kwo J., Hong M., Kortan A.R., Queeney K.L., Chabal Y.J., Opila R.L. Jr., Muller D.A., Chu S.N.G., Sapjeta B.J., Lay T.S., Mannaerts J.P., Boone T., Krautter H.W., Krajewski J.J., Sergnt A.M., Rosamilia J.M. J. Appl. Phys. 89:2001;3920.
8. Gusev E.P., Cartier E., Buchanan D.A., Gribelyuk M., Copel M., Okorn-Schmidt H., D'Emic C. Microelec. Eng. 59:2001;341.
9. Winer K., Hirabayshi I., Ley L. Phys. Rev. B. 38:1988;7680.
10. Miyazaki S., Maruyama T., Kohno A., Hirose M. Microelec. Eng. 48:1999;63.
11. Robertson J. J. Vac. Sci. Technol. B18:2000;1875.