An analysis and MIMO extension of a double EWMA run-to-run controller for non-squared systems

International Journal of Reliability, Quality and Safety Engineering

Volumn 10, Issue 4, 2003, Pages 417-428

  Rajagopal, Ramkumar ^a   Del Castillo, Enrique ^a  

^a The Pennsylvania State University   (United States)

Author keywords

Engineering process control; EWMA controller; Process adjustment; Semiconductor manufacturing control

Indexed keywords

ALGORITHMS; FORECASTING; MATRIX ALGEBRA; PROCESS CONTROL; QUALITY CONTROL; REGRESSION ANALYSIS; ROBUSTNESS (CONTROL SYSTEMS); STATISTICS; VECTORS;

ENGINEERING PROCESS CONTROL; NON-SQUARED SYSTEMS; PROCESS ADJUSTMENT; SEMICONDUCTOR MANUFACTURING CONTROLS;

CONTROL EQUIPMENT;

EID: 1642495590     PISSN: 02185393     EISSN: None     Source Type: Journal    
DOI: 10.1142/S021853930300124X     Document Type: Review

References (9)

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