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Volumn 34, Issue 12, 2002, Pages 1055-1068

A multivariate double EWMA process adjustment scheme for drifting processes

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MATRIX ALGEBRA; SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL PROCESS CONTROL;

EID: 0036887726     PISSN: 0740817X     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1019614312908     Document Type: Article
Times cited : (65)

References (18)
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    • Adivikolanu, S. and Zafiriou, E. (2000) Extensions and performance/robustness tradeoffs of the EWMA run-to-run controller by suing the internal model control structure. IEEE Transactions on Electronics Packaging Manufacturing, 23(1), 56-68.
    • (2000) IEEE Transactions on Electronics Packaging Manufacturing , vol.23 , Issue.1 , pp. 56-68
    • Adivikolanu, S.1    Zafiriou, E.2
  • 5
    • 0028425441 scopus 로고
    • Supervisory run-to-run control of a polysilicon gate etch using in situ ellipsometry
    • Butler, S.W. and Stefani, J.A. (1994) Supervisory run-to-run control of a polysilicon gate etch using in situ ellipsometry. IEEE Transactions on Semiconductor Manufacturing, 7, 193-201.
    • (1994) IEEE Transactions on Semiconductor Manufacturing , vol.7 , pp. 193-201
    • Butler, S.W.1    Stefani, J.A.2
  • 6
    • 85056912945 scopus 로고    scopus 로고
    • Age-based double EWMA controller and its application to a CMP process
    • Moyne, J., Del Castillo, E. and Hurwitz, A. (eds.), CRC Press, Boca Raton, FL
    • Chen, A. and Guo, R.S. (2001) Age-based double EWMA controller and its application to a CMP process, in Run-to-Run Control in Semiconductor Manufacturing, Moyne, J., Del Castillo, E. and Hurwitz, A. (eds.), CRC Press, Boca Raton, FL, pp. 261-278.
    • (2001) Run-to-Run Control in Semiconductor Manufacturing , pp. 261-278
    • Chen, A.1    Guo, R.S.2
  • 7
    • 0033321365 scopus 로고    scopus 로고
    • Long run and transient analysis of a double EWMA feedback controller
    • Del Castillo, E. (1999) Long run and transient analysis of a double EWMA feedback controller. IIE Transactions, 31, 1-13.
    • (1999) IIE Transactions , vol.31 , pp. 1-13
    • Del Castillo, E.1
  • 8
    • 0001545483 scopus 로고    scopus 로고
    • Some properties of EWMA feedback quality adjustment schemes for drifting disturbances
    • Del Castillo, E. (2001) Some properties of EWMA feedback quality adjustment schemes for drifting disturbances. Journal of Quality Technology, 33(2), 153-166.
    • (2001) Journal of Quality Technology , vol.33 , Issue.2 , pp. 153-166
    • Del Castillo, E.1
  • 9
    • 0031124332 scopus 로고    scopus 로고
    • Run-to-run process control: Literature review and extensions
    • Del Castillo, E. and Hurwitz, A.M. (1997) Run-to-run process control: literature review and extensions. Journal of Quality Technology, 29, 184-196.
    • (1997) Journal of Quality Technology , vol.29 , pp. 184-196
    • Del Castillo, E.1    Hurwitz, A.M.2
  • 10
    • 0000407245 scopus 로고
    • Stability and sensitivity of an EWMA controller
    • Ingolfsson, A. and Sachs, E. (1993) Stability and sensitivity of an EWMA controller. Journal of Quality Technology, 25(4), pp. 271-287.
    • (1993) Journal of Quality Technology , vol.25 , Issue.4 , pp. 271-287
    • Ingolfsson, A.1    Sachs, E.2
  • 11
    • 77955331694 scopus 로고
    • A multivariate exponentially weighted moving average control chart
    • Lowry, C.A., Woodall, W.H., Champ, C.W. and Rigdon, S.E. (1992) A multivariate exponentially weighted moving average control chart. Technometrics, 34, 46-53.
    • (1992) Technometrics , vol.34 , pp. 46-53
    • Lowry, C.A.1    Woodall, W.H.2    Champ, C.W.3    Rigdon, S.E.4
  • 14
    • 0010828112 scopus 로고    scopus 로고
    • Analysis and multivariate extensions of double EWMA feedback adjustment scheme for quality control
    • Master Thesis, Department of Industrial and Manufacturing Engineering, Penn State University, University Park, PA 16802
    • Rajagopal, R. (2000) Analysis and multivariate extensions of double EWMA feedback adjustment scheme for quality control. Master Thesis, Department of Industrial and Manufacturing Engineering, Penn State University, University Park, PA 16802.
    • (2000)
    • Rajagopal, R.1
  • 15
    • 0010820357 scopus 로고    scopus 로고
    • An analysis and MIMO extension of a double EWMA run-to-run controlle
    • Working paper. IME department, Penn State University, University Park, PA 16802
    • Rajagopal, R. and Del Castillo, E. (2001) An analysis and MIMO extension of a double EWMA run-to-run controlle. Working paper. IME department, Penn State University, University Park, PA 16802.
    • (2001)
    • Rajagopal, R.1    Del Castillo, E.2
  • 18
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    • A study of a multivariate EWMA controller
    • Working paper, Institute of Statistics, National Tsing Hua University, Hsin-Chu, Taiwan 30043, ROC
    • Tseng, S.T., Chou, R.J. and Lee, S.P. (2000) A study of a multivariate EWMA controller. Working paper, Institute of Statistics, National Tsing Hua University, Hsin-Chu, Taiwan 30043, ROC.
    • (2000)
    • Tseng, S.T.1    Chou, R.J.2    Lee, S.P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.