Silicalite-1/polymer films with low-k dielectric constants

Applied Surface Science

Volumn 226, Issue 1-3 SPEC. ISS., 2004, Pages 155-160

  Larlus, O ^a   Mintova, S ^b   Valtchev, V ^a   Jean, B ^c   Metzger, T H ^c   Bein, T ^b  

^a Ecole Nationale Superieure de Chimie de Mulhouse   (France)

^b UNIVERSITY OF MUNICH   (Germany)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Composite; Low k layers; Polymer; Zeolite

Indexed keywords

CALCINATION; HYDROPHILICITY; LIGHT SCATTERING; MICROSENSORS; PERMITTIVITY; POLYMERS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SPIN COATING; STRENGTH OF MATERIALS; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION; ZEOLITES;

DYNAMIC LIGHT-SCATTERING (DLS); LOW-K LAYERS;

SILICON WAFERS;

EID: 1642360638     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2003.11.062     Document Type: Conference Paper

References (12)

1. Lan J.K., Wang Y.L., Wu Y.L., Lious H.C., Cheng Y.L. Thin Sold Films. 377:2000;776.
2. Lee J.K., Char K., Rhee H.W., Yoon D.Y. Copolymer. 42:2001;9085.
3. J.F. Brinker, G.W. Scherer, Sol-gel Science, Academic Press, San Diego, 1990.
4. Yang C.-M., Cho A.-T., Pan F.-M., Tsai T.-G. Adv. Mater. 13:2001;1099.
5. Balkenende A.R., de Theije F.K., Kriege F.C., Koen I.C. Adv. Mater. 15:2003;139.
6. Santen R.A., Kramer G.J. Chem. Rev. 95:1995;637.
7. Mintova S., Bein T. Adv. Mater. 13:2001;1880.
8. Toma D., Kaushal S., Fatke D. Proc. Electrochem. Soc. 99(7):2000;5.
9. C. Baerlocher, W.M. Meier, D.H. Olson, Atlas of Zeolite Framework Types, Elsevier, Amsterdam, 2001.
10. M.M.J. Treacy, J.B. Higgins, R.Ballmoos, Collection of Simulated XRD Powder Patterns for Zeolites, Elsevier, New York, 1996.
11. Metzger T.H., Mintova S., Bein T. Micropor. Mesopor. Mater. 43:2001;191.
12. J.F. Gaynor, US Patent 6,329,062 (2000).