Micro/nano-machining on silicon surface with a modified atomic force microscope

Chinese Journal of Mechanical Engineering (English Edition)

Volumn 14, Issue 3, 2001, Pages 207-211

  Zhao, Qingliang ^a   Sun, Tao ^a   Dong, Shen ^a   Liang, Yingchun ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Atomic force microscope; Diamond tip; Mechanical property; Nano machining; Single crystal silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION; DUCTILITY; ELASTIC MODULI; HIGH TEMPERATURE EFFECTS; INDENTATION; MICROCRACKS; PLASTIC DEFORMATION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SILICA; SINGLE CRYSTALS; SURFACE ROUGHNESS;

NANO-MACHINING;

MICROMACHINING;

EID: 0035453797     PISSN: 10009345     EISSN: None     Source Type: Journal    
DOI: 10.3901/cjme.2001.03.207     Document Type: Article

References (10)

1. Atomic force microscope
2. Nanoscale layer removal of metal surface by scanning probe microscope scratching
3. Micromachining of metal surfaces by scanning probe micoscope
4. Tribological studies of silicon for magnetic recording applications
5. Nanoindentation hardness measurements using atomic force microscopy
6. Wear mechanism in reciprocal scratching of polycarbonate studied by atomic force microscopy
7. Nanometer - Scale roughness study and indentation test with a scanning tunneling microscope
8. Atomic force microscope as a tool for metal surface modifications
9. Micro-Nanoscale friction and wear mechanisms of thin films using atomic force and friction force microscopy
10. + - Implanted silicon investigated by scanning probe microscopy