Tapered tilted linear zone plates for focusing hard x-rays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5539, Issue , 2004, Pages 165-173

  Ocola, L E ^a   Maser, J ^a   Vogt, S ^a   Lai, B ^a   Divan, R ^a   Stephenson, G B ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOCAL PLANE; HARD X RAYS; INTERFACE PROPERTIES; TAPERED TILTED LINEAR ZONE PLATES;

COMPUTER SIMULATION; DIFFRACTION; FOCUSING; IMAGING SYSTEMS; LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY;

X RAYS;

EID: 15844383824     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559772     Document Type: Conference Paper

References (11)

1. J. Maser, G. B. Stephenson, D. Shu, B. Lai, S. Vogt, A. Khounsary, Y. Li, C. Benson, G. Schneider, "Conceptual design for a beamline for a hard x-ray nanoprobe with 30 nm spatial resolution", CP705 "Synchrotron Radiation Instrumentation: Eighth International Conference", Editor T. Warwick et al., AIP, p. 470, (2004)
2. D. C. Shaver, D. C. Flanders, N. M. Ceglio, H. I. Smith, "X-ray zone plates fabricated using electron-beam and x-ray lithography", J. Vac. Sci. Technol., 16, 1626, (1979)
3. S. J. Spector, C. J. Jacobsen, D. M. Tennant, "Process optimization for production of sub-20 nm soft x-ray zone plates", J. Vac. Sci. Technol. B, 15, 2872, (1997)
4. E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, D. Attwood, "Nanofabrication and diffractive optics for high-resolution x-ray applications", J. Vac. Sci. Technol. B, 18, 2970, (2000)
5. W. Yun, B. Lai, Z. Cai, J. Maser, D. Legnini, E. Gluskin, Z. Chen, A. A. Krasnoperova, Y. Vladimirsky, F. Cerrina, E. Di Fabrizio, M. Gentili, "Nanometer focusing of hard x-rays by phase zone plates", Rev. Sci. Instrum., 70, (1999)
6. C. David, B. Nöhammer, E. Zeigler, "Wavelength tunable diffractive transmission lens for hard x-rays", Appl. Phys. Lett., 79, 1088, (2001)
7. C. David, B. Nöhammer, H. H. Solak, F. Glaus, B. Haas, A. Grublenk, A. Dolocan, E. Zeigler, O. Hignette, M. Burghammer, B. Kaulich, J. Susini, J. H. H. Bongaerts, J. F. van der Veen, "Diffractive soft and hard x-ray optics", J. Phys. IV France, 104, 171, (2003)
8. A. Stein, C. Jacobsen, K. Evans-Lutterodt, D. M. Tennant, G. Bogart, F. Klemens, L. E. Ocola, B. J. Choi, S. V. Sreenivasan, "Diffractive x-ray optics using production fabrication methods", J. Vac. Sci. Technol. B, 21, 214, (2003)
9. B. Nöhammer, J. Hoszowska, H.-P. Herzig, C. David, "Zoneplates for hard x-rays with ultra-high diffraction efficiencies", J. Phys. IV France, 104, 193, (2003)
10. M. P. Stoykovich, H. B. Cao, K. Yoshimoto, L. E. Ocola, P. F. Nealey, "Deformation of Nanoscopic Polymer Structures in Response to Well-Defined Capillary Forces", Adv. Mater, 15, 1180, (2003)
11. D. Attwood, "Soft x-rays and extreme ultraviolet radiation, Principles and applications", Chapter 9, Cambridge University Press, (1999)