A simple method for determination of thermal conductivity coefficients of thin films

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 3, Issue , 2001, Pages 819-826

  Pan, Chi Hsiang ^a   Tung, Chien Li ^b  

^a NATIONAL CHIN YI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; INTERFEROMETRY; MICROMACHINING; MICROSTRUCTURE; POLYSILICON; SENSORS; THERMAL CONDUCTIVITY; THERMOELECTRICITY; THIN FILMS; X RAY DIFFRACTION;

BULK MATERIALS; THERMOELECTRIC SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 1542642416     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

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