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Volumn 1, Issue , 1995, Pages 178-181
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Process-dependent thermophysical properties of CMOS IC thin films
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER CONCENTRATION;
CHARGE CARRIERS;
CHEMICAL VAPOR DEPOSITION;
CMOS INTEGRATED CIRCUITS;
DIELECTRIC MATERIALS;
ELECTRIC CONDUCTIVITY;
MICROSTRUCTURE;
PHYSICAL PROPERTIES;
SEMICONDUCTING SILICON;
SPECIFIC HEAT;
THERMAL CONDUCTIVITY;
SEEBECK COEFFICIENT;
SHEET RESISTANCE;
TEMPERATURE COEFFICIENT;
THERMAL MASSES;
THERMAL MICROSENSORS;
THERMOELECTRIC TEMPERATURE SENSORS;
THERMOPHYSICAL PROPERTIES;
THIN FILMS;
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EID: 0029511829
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (41)
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References (4)
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