X-ray Nanotomography (XRMT) Tool for Non-destructive High-Resolution Imaging of ICs

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2001, Pages 15-22

  Yun, Wenbing ^a   Wang, Steve ^a   Scott, David ^a   Nill, Kenneth W ^a   Haddad, Waleed S ^b  

^a XRADIA INC   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CHARGE COUPLED DEVICES; COMPUTER SOFTWARE; COMPUTERIZED TOMOGRAPHY; DEFECTS; ELECTROMIGRATION; FAILURE ANALYSIS; IMAGE RECONSTRUCTION; IMAGING TECHNIQUES; LIGHT ABSORPTION; NONDESTRUCTIVE EXAMINATION; OPTICAL RESOLVING POWER; PRINTED CIRCUIT BOARDS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS;

LINE SPREAD FUNCTION (LSF); SPATIAL RESOLUTION; X-RAY NANOTOMOGRAPHY (XRMT);

INTEGRATED CIRCUITS;

EID: 1542360562     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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