SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Physics Letters

Volumn 74, Issue 1, 1999, Pages 150-152

Tomographic reconstruction of an integrated circuit interconnect

(5) Levine, Zachary H a Kalukin, Andrew R b Frigo, Sean P c McNulty, Ian c Kuhn, Markus d

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b RENSSELAER POLYTECHNIC INSTITUTE (United States)

c ARGONNE NATIONAL LABORATORY (United States)

d HEWLETT PACKARD COMPANY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001900677 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.123135 Document Type: Article

Times cited : (56)

References (16)

1
- 0003818926
- McGraw-Hill, New York
- G. K. Rao, Multilevel Interconnect Technology (McGraw-Hill, New York, 1993).
- (1993) Multilevel Interconnect Technology
- Rao, G.K.¹

2
- 0023159523
- B. P. Flannery, H. W. Deckman, W. G. Roberge, and K. L. D'Amico, Science 237, 1439 (1987).
- (1987) Science , vol.237 , pp. 1439
- Flannery, B.P.¹ Deckman, H.W.² Roberge, W.G.³ D'Amico, K.L.⁴

3
- 0008212362
- K. L. D'Amico, J. H. Dunsmuir, S. R. Ferguson, B. P. Flannery, and H. W. Deckman, Rev. Sci. Instrum. 63, 574 (1992).
- (1992) Rev. Sci. Instrum. , vol.63 , pp. 574
- D'Amico, K.L.¹ Dunsmuir, J.H.² Ferguson, S.R.³ Flannery, B.P.⁴ Deckman, H.W.⁵

4
- 0027976493
- T. Takeda, Y. Itai, K. Hayashi, J. Nagata, and H. Yamaji, J. Comput. Assist. Tomogr. 18, 98 (1994).
- (1994) J. Comput. Assist. Tomogr. , vol.18 , pp. 98
- Takeda, T.¹ Itai, Y.² Hayashi, K.³ Nagata, J.⁴ Yamaji, H.⁵

5
- 4243201497
- A. B. Hmelo, J. X-Ray Sci. Technol. 4, 290 (1994).
- (1994) J. X-Ray Sci. Technol. , vol.4 , pp. 290
- Hmelo, A.B.¹

6
- 0001544298
- P. Spanne, T. C. J. Jacquin, W. B. Lindquist, K. W. Jones, and P. M. Adler, Phys. Rev. Lett. 73, 2001 (1994).
- (1994) Phys. Rev. Lett. , vol.73 , pp. 2001
- Spanne, P.¹ Jacquin, T.C.J.² Lindquist, W.B.³ Jones, K.W.⁴ Adler, P.M.⁵

7
- 0029752038
- W. B. Lindquist, S.-M. Lee, D. A. Coker, K. W. Jones, and P. Spanne, J. Geophys. Res. 101, 8297 (1996).
- (1996) J. Geophys. Res. , vol.101 , pp. 8297
- Lindquist, W.B.¹ Lee, S.-M.² Coker, D.A.³ Jones, K.W.⁴ Spanne, P.⁵

8
- 85069407551
- A. Peskin, B. Andrews, B. Dowd, K. Jones, and P. Siddons, Proc. SPIE 2847, 28 (1996).
- (1996) Proc. SPIE , vol.2847 , pp. 28
- Peskin, A.¹ Andrews, B.² Dowd, B.³ Jones, K.⁴ Siddons, P.⁵

9
- 0030801614
- F. Beckmann, U. Bonse, F. Busch, and O. Gunnewig, J. Comput. Assist. Tomogr. 21, 539 (1997).
- (1997) J. Comput. Assist. Tomogr. , vol.21 , pp. 539
- Beckmann, F.¹ Bonse, U.² Busch, F.³ Gunnewig, O.⁴

10
- 0028076309
- W. S. Haddad, I. McNulty, J. E. Trebes, E. H. Anderson, R. A. Levesque, and L. Yang, Science 266, 1213 (1994).
- (1994) Science , vol.266 , pp. 1213
- Haddad, W.S.¹ McNulty, I.² Trebes, J.E.³ Anderson, E.H.⁴ Levesque, R.A.⁵ Yang, L.⁶

11
- 0031071940
- J. Lehr, Optik (Stuttgart) 104, 166 (1997).
- (1997) Optik (Stuttgart) , vol.104 , pp. 166
- Lehr, J.¹

12
- 0029004946
- J. Kirz, C. Jacobsen, and M. Howells, Q. Rev. Biophys. 28, 33 (1995).
- (1995) Q. Rev. Biophys. , vol.28 , pp. 33
- Kirz, J.¹ Jacobsen, C.² Howells, M.³

13
- 0000420429
- I. McNulty, W. S. Haddad, J. E. Trebes, and E. H. Anderson, Rev. Sci. Instrum. 66, 1431 (1995).
- (1995) Rev. Sci. Instrum. , vol.66 , pp. 1431
- McNulty, I.¹ Haddad, W.S.² Trebes, J.E.³ Anderson, E.H.⁴

14
- 20344375857
- I. McNulty, Y. P. Feng, S. P. Frigo, and T. M. Mooney, Proc. SPIE 3150, 195 (1997).
- (1997) Proc. SPIE , vol.3150 , pp. 195
- McNulty, I.¹ Feng, Y.P.² Frigo, S.P.³ Mooney, T.M.⁴

15
- 0000466398
- B. P. Flannery and W. G. Roberge, J. Appl. Phys. 62, 4668 (1987).
- (1987) J. Appl. Phys. , vol.62 , pp. 4668
- Flannery, B.P.¹ Roberge, W.G.²

16
- 0015372442
- P. Gilbert, J. Theor. Biol. 36, 105 (1972).
- (1972) J. Theor. Biol. , vol.36 , pp. 105
- Gilbert, P.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.