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Volumn , Issue , 2002, Pages 313-316
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A Methodology to Reduce Ion Beam Induced Damage in TEM Specimens Prepared by FIB
a
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
CRYSTAL ORIENTATION;
FAILURE ANALYSIS;
INTEGRATED CIRCUITS;
ION BOMBARDMENT;
OXIDATION;
SEMICONDUCTING SILICON;
SILICON WAFERS;
STRUCTURAL ANALYSIS;
THICKNESS MEASUREMENT;
TRANSMISSION ELECTRON MICROSCOPY;
DEFECT DIAGNOSIS;
ION MILLING;
SPIN ON GLASS (SOG);
ION BEAMS;
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EID: 1542360101
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (7)
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