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Volumn , Issue , 2002, Pages 313-316

A Methodology to Reduce Ion Beam Induced Damage in TEM Specimens Prepared by FIB

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL ORIENTATION; FAILURE ANALYSIS; INTEGRATED CIRCUITS; ION BOMBARDMENT; OXIDATION; SEMICONDUCTING SILICON; SILICON WAFERS; STRUCTURAL ANALYSIS; THICKNESS MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY;

EID: 1542360101     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (7)
  • 7
    • 1542283832 scopus 로고    scopus 로고
    • J. F. Ziegler, J. P. Biersack and U. Littmark, Pergamon Press, New York, 1985
    • J. F. Ziegler, J. P. Biersack and U. Littmark, Pergamon Press, New York, 1985


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.