Optimizing Backside Image Quality

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2002, Pages 155-161

  Falk, R Aaron ^a  

^a OptoMetrix Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNIFICATION;

CHARGE COUPLED DEVICES; IMAGING SYSTEMS; IMAGING TECHNIQUES; OPTICAL SYSTEMS; OPTIMIZATION; SILICON;

IMAGE QUALITY;

EID: 1542330265     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. For a review and further references see: B.V. Davis, "A Comparison of Backside Emission Microscopy Systems", Proceedings ISTFA 2000, 173-6 (2000).
2. th Edition, 487-503 (1999).
3. R.A. Falk and E.W. Budiarto "Application of Near IR. Phase Contrast Imaging to Backside Failure Isolation and Analysis", Proceedings ISTFA 2000, 567-73 (2000).
4. L.A. Knauss, B.M. Frazier, H.M. Christen, S.D. Silliman, K.S. Harshavardhan, E.F. Fleet, F.C. Wellstood, M. Mahanpour, and A. Ghaemmaghami, "Detecting Power Shorts from Front and Backside of IC Packages Using Scanning SQUID Microscopy", Proceedings ISTAF 1999, 11-16 (1999).
5. J.A. Kash, J.C. Tsang, D.R. Knebel, and D.P. Vallett, "Non-Invasive Backside Failure Analysis of Integrated Circuits by Time-Dependent Light Emission: Picosecond Imaging Circuit Analysis", Proceedings ISTFA 1998, 483-489 (1998).
6. R.A. Falk, "Near IR Absorption in Heavily Doped Silicon - An Empirical Approach", Proceedings ISTFA 2000, 121-7 (2000)
7. V. N. Mahajan, Optical Imaging and Aberrations , SPIE Optical Engineering Press, Bellingham, WA (1998).
8. V. N. Mahajan, Optical Imaging and Aberrations, 318-22, SPIE Optical Engineering Press, Bellingham, WA (1998).