Non-Invasive Backside Failure Analysis of Integrated Circuits by Time-Dependent Light Emission: Picosecond Imaging Circuit Analysis

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 1998, Pages 483-488

  Kash, J A ^a   Tsang, J C ^a   Knebel, D R ^a   Vallett, D P ^b  

^a IBM   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSIDE FAILURE ANALYSIS; IMAGING CIRCUIT ANALYSIS;

FIELD EFFECT TRANSISTORS; IMAGING TECHNIQUES; INTEGRATED CIRCUITS; ION BEAMS; LIGHT EMISSION; LOGIC GATES; OSCILLATIONS; PHOTOMULTIPLIERS;

FAILURE ANALYSIS;

EID: 1542330888     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. M. V. Fischetti, S. E. Laux, and E. Crabbe, J. Appl. Phys., 78, 1058-1087 (1995)
2. S. Villa, A. L. Lacaita, and A. Pacelli, Phys. Rev. B, 52, 10993-10999 (1995)
3. J. Bude, N. Sano, and A. Yoshii, Phys. Rev. B, 45, 5848-5856 (1992)
4. C. F. Hawkins, J. M. Soden, E. I. Cole, and E. S. Snyder, Proc. International Symposium for Testing and Failure Analysis, 1990,. 55-67
5. S. Tarn and C. Hu, IEEE Trans. Electron Devices, 31, 1264-1273 (1984)
6. Neil H. E. Weste and Kamran Eshraghian, Principles of CMOS VLSI Design, Second Edition, Reading, Massachusetts: Addison-Wesley, 1993.
7. J. C. Tsang and J. A. Kash, Appl. Phys. Lett., 70, 889-891 (1997)
8. J. A. Kash and J. C. Tsang, IEEE Electron Device Letters, 18, 330-332 (1997)
9. C. Firmani, E. Ruiz, C. W. Carlson, M. Lampton, and F. Paresce, Rev. Sci. Instrum. 53, 570-574, May, (1982)
10. J. C. Tsang, "Multichannel Detection and Raman Spectroscopy of Surface Layers and Interfaces", in Light Scattering in Solids V, eds. M. Cardona and G. Guntherodt, Berlin: Springer-Verlag, 1988), chapter 6, pp. 233-284.
11. S. Charbonneau, L. B. Allard, Jeff F. Young, G. Dyck and B. J. Kyle, Rev. Sci. Instrum., 63, 5315-5319 (1992)
12. Peter Song, "Power3 to replace P2SC", Microprocessor Report, 11, 23-27 (1997)