Reliability and failure analysis of RF MEMS switches

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2002, Pages 275-281

  De Wolf, Ingrid ^a   Van Spengen, W Merlijn ^a,b   Modlinski, Robert ^a,b   Jourdain, Anne ^a   Witvrouw, Ann ^a   Fiorini, Paolo ^a   Tilmans, Harrie A C ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITANCE; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; FAILURE ANALYSIS; FIELD EFFECT TRANSISTORS; GLOBAL POSITIONING SYSTEM; LOCAL AREA NETWORKS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; WIDE AREA NETWORKS;

CAPACITIVE SWITCHES; RF MEMS SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 1542330256     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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