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Volumn 1, Issue 4, 2001, Pages 288-295

Development of Novel Optoelectromechanical Systems Based on "Transparent Metals" PEG Structures

Author keywords

Cmos microsensors with optical output; Microsystems; MOEMS; Photonic bandgap materials

Indexed keywords


EID: 1542317184     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/7361.983468     Document Type: Article
Times cited : (30)

References (15)
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    • Development and application of photonic band-gap materials
    • C. M. Bowden, J. P. Dowling, and H. O. Everitt, "Development and application of photonic band-gap materials,"/ Opt. Soc. Amer. B, vol. 10, pp. 27913, 1993.
    • (1993) Opt. Soc. Amer. B , vol.10 , pp. 279-313
    • Bowden, C.M.1    Dowling, J.P.2    Everitt, H.O.3
  • 9
    • 84864898992 scopus 로고    scopus 로고
    • [Online].
    • [Online]. Available: http://www.physikinstrumente.com/produkte.html
  • 12
    • 0032625155 scopus 로고    scopus 로고
    • Resonant magnetic field microsensors in standard CMOS technology
    • Venezia
    • S. Baglio, L. Latorre, and P. Nouet, "Resonant magnetic field microsensors in standard CMOS technology," in 1EEE1MTC'99, Venezia, 1999.
    • (1999) IEEE1MTC'99
    • Baglio, S.1    Latorre, L.2    Nouet, P.3
  • 13
    • 0034250942 scopus 로고    scopus 로고
    • Laminated, sacrificial-poly MEMS technology in standard CMOS
    • D. F. Guillou, S. Santhanam, and L. R. Carley, "Laminated, sacrificial-poly MEMS technology in standard CMOS," Sens. Actuators A, vol. 85, 2000.
    • (2000) Sens. Actuators A , vol.85
    • Guillou, D.F.1    Santhanam, S.2    Carley, L.R.3
  • 14
    • 0034839453 scopus 로고    scopus 로고
    • Integrated microsystems in standard CMOS technology with application in the field of chemical sensors
    • Edinburgh, Scotland, May-June 30-1
    • S. Baglio, B. Andö, and N. Savalli, "Integrated microsystems in standard CMOS technology with application in the field of chemical sensors," in Proc. ofSPIEInt. Symp. Microelectron. MEMS Technol., Edinburgh, Scotland, May-June 30-1, 2001.
    • (2001) Proc. OfSPIEInt. Symp. Microelectron. MEMS Technol
    • Baglio, S.1    Andö, B.2    Savalli, N.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.