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Materials Science and Engineering: B

Volumn 107, Issue 3, 2004, Pages 321-331

Rotational grinding of silicon wafers - Sub-surface damage inspection

(3) Haapalinna, Atte a Nevas, Saulius b Pähler, Dietmar c

a Okmetic Oyj (Finland)

b AALTO UNIVERSITY (Finland)

c FRAUNHOFER INSTITUTE FOR PRODUCTION TECHNOLOGY IPT (Germany)

Author keywords

Metrology; Silicon wafer; Sub surface damage

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CORRELATION METHODS; CRYSTAL LATTICES; GRINDING (MACHINING); MEASUREMENTS; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY; SURFACE TOPOGRAPHY; X RAY DIFFRACTION ANALYSIS;

OPTICAL METHODS; SUB-SURFACE DAMAGE;

SILICON WAFERS;

EID: 1542305368 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2003.12.008 Document Type: Article

Times cited : (49)

References (15)

1
- 85166072702
- Tönshof H., Schmieden W., Inasaki I., König W., Spur G. Ann. CIRP. 39/2:1990;621.
- (1990) Ann. CIRP , vol.39 , Issue.2 , pp. 621
- Tönshof, H.¹ Schmieden, W.² Inasaki, I.³ König, W.⁴ Spur, G.⁵

2
- 1542360941
- VDI Verlag, Düsseldorf (in German)
- C. Menz, Randzonenanalyse bearbeiteter Silizium-Oberflächen. VDI Verlag, Düsseldorf, 1997 (in German).
- (1997) Randzonenanalyse Bearbeiteter Silizium-oberflächen
- Menz, C.¹

3
- 0034236074
- Chen L.-Q., Zhang X., Zhang T-Y., Lin H.Y., Lee S. J. Mater. Res. 15:2000;1441.
- (2000) J. Mater. Res. , vol.15 , pp. 1441
- Chen, L.-Q.¹ Zhang, X.² Zhang, T.-Y.³ Lin, H.Y.⁴ Lee, S.⁵

4
- 0030436720
- Li Y., Danyluk S. Wear. 200:1996;238.
- (1996) Wear , vol.200 , pp. 238
- Li, Y.¹ Danyluk, S.²

5
- 0030195995
- Xu H., Jahanmir S., Ives L. J. Mater. Res. 11:1997;1717.
- (1997) J. Mater. Res. , vol.11 , pp. 1717
- Xu, H.¹ Jahanmir, S.² Ives, L.³

6
- 0037121671
- Myers T., VanMil B., Holbert L., Peng C., Stinespring C., Alam J., Freitas J., Dmitriev V., Pechnikov A., Shapovalova Y., Ivantsov V. J. Cryst. Growth. 246:2002;244.
- (2002) J. Cryst. Growth , vol.246 , pp. 244
- Myers, T.¹ Vanmil, B.² Holbert, L.³ Peng, C.⁴ Stinespring, C.⁵ Alam, J.⁶ Freitas, J.⁷ Dmitriev, V.⁸ Pechnikov, A.⁹ Shapovalova, Y.¹⁰ Ivantsov, V.¹¹

7
- 0012683263
- Leipzig: Deutscher Verlag für Grundstofftechnik (in German)
- H.-F. Hadamovsky (Ed.), Werkstoffe der Halbleitertechnik. Leipzig: Deutscher Verlag für Grundstofftechnik, 1990 (in German).
- (1990) Werkstoffe der Halbleitertechnik
- Hadamovsky, H.-F.¹

8
- 0039436343
- Fisher P., Vickers R.E.M. Appl. Phys. Lett. 79:2001;3458.
- (2001) Appl. Phys. Lett. , vol.79 , pp. 3458
- Fisher, P.¹ Vickers, R.E.M.²

9
- 85166145182
- Master Thesis (M.Sc.), HUT
- S. Nevas, Facility for measurements of spectral diffuse reflectance. Master Thesis (M.Sc.), HUT, 2000.
- (2000) Facility for Measurements of Spectral Diffuse Reflectance
- Nevas, S.¹

10
- 0026461497
- Jellison G.E. Jr. Opt. Mater. 1:1992;41.
- (1992) Opt. Mater. , vol.1 , pp. 41
- Jellison, G.E.Jr.¹

11
- 85166045460
- SPIE Press
- J.C. Stover, Optical Scattering: Measurement and Analysis, second ed., SPIE Press, 1995.
- (1995) Optical Scattering: Measurement and Analysis, Second, Ed.
- Stover, J.C.¹

12
- 85166058760
- Ogata Y., Kobayashi K., Daio H. J. Cryst. Growth. 210:2000;36.
- (2000) J. Cryst. Growth , vol.210 , pp. 36
- Ogata, Y.¹ Kobayashi, K.² Daio, H.³

13
- 85166050062
- 9-10 May, Hannover, Germany
- D. Schneider, B. Schultrich, P. Siemroth, M. Leonhardt, A. Franke, in: Proceedings of The Coatings 2001, 9-10 May 2001, Hannover, Germany.
- (2001) Proceedings of The Coatings 2001
- Schneider, D.¹ Schultrich, B.² Siemroth, P.³ Leonhardt, M.⁴ Franke, A.⁵

14
- 0033706596
- Geiler H., Kürner W., Storbeck O. MRS Proc. 591:2000;249-254.
- (2000) MRS Proc. , vol.591 , pp. 249-254
- Geiler, H.¹ Kürner, W.² Storbeck, O.³

15
- 85166034363
- Toronto, Canada, Spring
- H. Geiler, H. Karge, B. Krimbacher, in: Proceedings of the Electrochemical Society PV 2000-9, Toronto, Canada, Spring 2000, p. 347.
- (2000) Proceedings of the Electrochemical Society PV 2000-9 , pp. 347
- Geiler, H.¹ Karge, H.² Krimbacher, B.³

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