Bulk stress due to surface damage of crystalline silicon and germanium

Applied Physics Letters

Volumn 79, Issue 21, 2001, Pages 3458-3460

  Fisher, P ^a   Vickers, R E M ^a  

^a UNIVERSITY OF WOLLONGONG   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039436343     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1418268     Document Type: Article

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