Genetic algorithms for geometry optimization in lithographic imaging systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5558, Issue PART 1, 2004, Pages 29-40

  Fühner, Tim ^a   Erdmann, Andreas ^a   Schnattinger, Thomas ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

Author keywords

Automatic Optimization; Genetic Algorithms; Resolution Enhancement Techniques

Indexed keywords

ARRAYS; COMPUTATIONAL GEOMETRY; GENETIC ALGORITHMS; LITHOGRAPHY; MASKS; OPTICAL RESOLVING POWER; OPTIMIZATION; PROBLEM SOLVING; PROJECTION SYSTEMS;

AUTOMATIC OPTIMIZATION; LITHOGRAPHIC IMAGING SYSTEMS; OPTICAL PROXIMITY CORRECTION (OPC); RESOLUTION ENHANCEMENT TECHNIQUES;

IMAGING SYSTEMS;

EID: 14944369973     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.560085     Document Type: Conference Paper

References (8)

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