Addressing large arrays of electrostatic actuators for adaptive optics applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5553, Issue , 2004, Pages 17-27

  Hui, Jeremy R ^a   Wu, Xingtao ^a   Warded, Cardinal ^b  

^a Optron Systems Inc   (United States)

^b Department of Electrical Engineering and Computer Science   (United States)

Author keywords

Adaptive optics; CMOS; High voltage; MEMS; Spatial light modulator; VLSI

Indexed keywords

GATE OXIDES; HIGH-VOLTAGE; SPATIAL RESOLUTION; VLSI;

ADAPTIVE OPTICS; AMPLIFIERS (ELECTRONIC); CMOS INTEGRATED CIRCUITS; ELECTRIC POTENTIAL; LIGHT MODULATION; MICROELECTROMECHANICAL DEVICES; MULTIPLEXING; PHASE MODULATION; SEMICONDUCTOR JUNCTIONS; VLSI CIRCUITS;

ELECTROSTATIC ACTUATORS;

EID: 14944360672     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.563892     Document Type: Conference Paper

References (19)

1. T.N.Horsky, C.M. Schiller, G.J., Genetti, D.M. O'Mara, W.S. Hamnett, and C. Warde, "Electron-beam addressed membrane light modulator scene projection," Proc. SPIE 1540, pp. 527-532, 1991.
2. M. Lemkin, "A 200-V high-voltage amplifier using a parasitic field-oxide transistor for voltage feedback," J. Solid-State Circuits, Vol. 38, No. 10, Oct 2003, pp. 1730-1734.
3. Personal communication, Dr. Dahong Qian.
4. S.L. Garverick, M.L. Nagy, M.J. Kane, Guo Jun, "Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays," Proc. Custom Integrated Circuits Conference, 2003, pp. 481-484.
5. S.T. Wilkinson, J. Tabler, N.M. Jokerst, M. Brooke, R.P. Leavitt, "An 8×8 array of resonant cavity enhanced light emitting diodes integrated onto silicon grayscale (32 level) driver circuitry," LEOS 96, Vol. 2, 1996, pp. 277-278.
6. C.W. Storment, D.A. Borkholder, V. Wersterlind, J.W. Suh, N.I. Maluf, G.T.A. Kovacs, "Flexible, dry-released process for aluminum electrostatic actuators," JMEMS, Vol. 3 No. 3, 1994, pp. 90-96.
7. Dalsa Semiconductor, C08G CMOS/DMOS process, dalsasemi.com
8. Austriamicrosystems, CMOS high-voltage process, austriamicrosystems.com
9. Taiwain Semiconductor Manufacturing Corp., CMOS high-voltage process, tsmc.com
10. Clare Semiconductor, claresemi.com
11. United Manufacturing Corp., umc.com
12. S. Senturia, Microsystem Design, Kluwer Academic, Boston, 2001.
13. P.R. Gray and R.G. Meyer, Analysis and Design of Analog Integrated Circuits, Wiley, New York, 1993.
14. J.M. Rabaey, Digital Integrated Circuits: A Design Perspective, Prentice Hall, New Jersey, 1996.
15. Y. Nemirovsky and O.Bochobza-Degani, "A methodology and model for the pull-in parameters of electrostatic actuators," J. MEMS, Vol. 10, No. 4, Dec 2001, pp. 601-615.
16. R. Nadal-Guardia, A. Dehe, R. Aigner, and L.M. Castaner, "Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point", JMEMS, Vol. 11, No. 3, June 2002.
17. J. Pons-Nin, A. Rodriguez, and L.M. Castaner. "Voltage and pull-in time in current drive of electrostatic actuators," J.MEMS, Vol. 11, No. 3, June 2002, pp. 196-205.
18. J.I. Seeger and S.B. Crary, "Stabilization of electrostatically actuated mechanical devices," 1997 Intl. Conf. on Solid-State Sensors and Actuators (Transducers '97), Chicago, IL, USA, pp. 1133-1136.
19. J.I. Seeger and B.E. Boser, "Dynamics and control of parallel-plate actuators beyond the electrostatic intstability." 1999 Intl. Conf. on Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, pp. 474-477.