Growth and characterisation of birefringent films on textured silicon substrates

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 436-441

  Walsby, E D ^a   Arnold, M ^a,b   Wu, Q H ^b   Hodgkinson, I J ^b   Blaikie, R J ^a  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

^b UNIVERSITY OF OTAGO   (New Zealand)

Author keywords

Birefringence; Electron beam lithography; Polarisation; Serial bi deposition; Textured substrates

Indexed keywords

BIREFRINGENCE; CHARACTERIZATION; ELECTRON BEAM LITHOGRAPHY; POLARIZATION; SUBSTRATES; TEXTURES;

BIREFRINGENT FILMS; ELECTRON-BEAM LITHOGRAPHY; SERIAL BI-DEPOSITION; TEXTURED SUBSTRATES;

SILICON;

EID: 14944339739     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.055     Document Type: Conference Paper

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