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Volumn 12, Issue 1, 2001, Pages 11-13
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Thin-film regular-array structures with 10-100 nm repeat distance
a
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
COMPUTER SIMULATION;
CRYSTAL MICROSTRUCTURE;
DEPOSITION;
ELECTRON BEAMS;
ENERGY DISPERSIVE SPECTROSCOPY;
EVAPORATION;
FABRICATION;
FILM GROWTH;
SUBSTRATES;
SURFACE ROUGHNESS;
TRANSMISSION ELECTRON MICROSCOPY;
HELICS;
THIN-FILM REGULAR-ARRAY STRUCTURES;
THIN FILMS;
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EID: 0035280173
PISSN: 09574484
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-4484/12/1/303 Document Type: Article |
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Times cited : (27)
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References (17)
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