Deposition technologies for micromanufacturing: A review

Journal of Manufacturing Science and Engineering

Volumn 126, Issue 4, 2004, Pages 787-795

  Kadekar, Vinay ^a   Fang, Weiya ^a   Liou, Frank ^a  

^a MISSOURI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CHROMIUM COMPOUNDS; LITHOGRAPHY; MELTING; MICROMACHINING; NANOSTRUCTURED MATERIALS; POWDERS; SILICON COMPOUNDS; SURFACE PROPERTIES;

DEPOSITION TECHNOLOGY; MICRODEPOSITION; MICROMANUFACTURING; MICROSCALE STRUCTURE;

DEPOSITION;

EID: 14844286164     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1811118     Document Type: Review

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