Particle manipulation and surface patterning by laser guidance

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3859-3863

  Renn, Michael J ^a   Pastel, Robert ^a  

^a MICHIGAN TECHNOLOGICAL UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000285579     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590424     Document Type: Article

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