Sub-micron coatings with low friction and wear for micro actuators

Microsystem Technologies

Volumn 8, Issue 1, 2002, Pages 51-54

  Bandorf, R ^a,b   Luthje H ^a,b   Schiffmann, K ^a,b   Staedler, T ^a,b   Wortmann, A ^a,b  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; DIAMOND LIKE CARBON FILMS; DOPING (ADDITIVES); FRICTION; HARDNESS; MICROSCOPIC EXAMINATION; NANOSTRUCTURED MATERIALS; TRIBOLOGY; WEAR OF MATERIALS;

NANO-COATINGS; SCANNING PROBE MICROSCOPE;

MICROACTUATORS;

EID: 0036494045     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-001-0155-5     Document Type: Article

References (9)

1. A comparison of microactuator concepts in view of fabrication technologies and applications
2. A novel variable reluctance micromotor for linear actuation
3. Adhesion improvement of cBN film by B-C-N gradient layer system
4. Correlation of nanomechanical and nanotribological behaviour of thin DLC coatings on different substrates
5. An improved technique for determining hardness and elstic modulus using load and displacement sensing indentation experiments
6. Novel characterization-tool for determination of micro wear-resistance
7. x and DLC coatings
8. New methodologies for measuring film thickness, coverage, and topography