SCOPUS 정보 검색 플랫폼

Vacuum

Volumn 78, Issue 1, 2005, Pages 67-71

Study of TiN/BN bilayers produced by pulsed arc plasma

(5) Devia, D a Ospina, R a Benavides, V a Restrepo, E a Devia, A a

a UNIVERSIDAD NACIONAL DE COLOMBIA (Colombia)

Author keywords

Hard coatings; Pulsed discharge; Semiconductor I V curves; TiN BN bilayers

Indexed keywords

BORON COMPOUNDS; COATINGS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRODES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NITROGEN; PHYSICAL VAPOR DEPOSITION; SILICON; SUBSTRATES; TITANIUM NITRIDE; VACUUM APPLICATIONS;

HARD COATINGS; PULSED DISCHARGE; SEMICONDUCTOR I-V CURVES; TIN/BN BILAYERS;

PLASMAS;

EID: 14644390953 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2004.12.016 Document Type: Article

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.