Assumptions in thin film residual stress methods

Materials Science Forum

Volumn 404-407, Issue , 2002, Pages 35-42

  Vermeulen, Arnold C ^a  

^a MALVERN INSTRUMENTS LTD   (United Kingdom)

Author keywords

Assumption analysis; g( ) method; Stress method; Thin film; X ray diffraction

Indexed keywords

ANISOTROPY; LATTICE CONSTANTS; RESIDUAL STRESSES; STRAIN; STRESS ANALYSIS; X RAY ANALYSIS;

STRESS MEASUREMENT;

THIN FILMS;

EID: 0036431167     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.404-407.35     Document Type: Conference Paper

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