Field electron emission from amorphous carbon films grown in pure methane plasma

Applied Surface Science

Volumn 185, Issue 3-4, 2002, Pages 243-247

  Baek, Yang Gyu ^a   Ikuno, Takashi ^a   Ryu, Jeong Tak ^b   Honda, Shin Ichi ^a   Katayama, Mitsuhiro ^a   Oura, Kenjiro ^a   Hirao, Takashi ^a  

^a OSAKA UNIVERSITY   (Japan)

^b Daegu University   (South Korea)

Author keywords

Amorphous carbon films; Field electron emission; Graphite crystallite growth; Methane plasma; Surface morphology

Indexed keywords

CRYSTAL GROWTH; ELECTRON EMISSION; FILM GROWTH; GRAPHITE; HIGH TEMPERATURE EFFECTS; METHANE; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY;

METHANE PLASMAS;

AMORPHOUS FILMS;

EID: 0037080250     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00786-3     Document Type: Article

References (15)