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Volumn 7, Issue 2-5, 1998, Pages 699-703

Investigation of hydrogenated amorphous carbon (a-C:H) films produced by ArF (193 nm) laser ablation of poly (methyl methacrylate)

Author keywords

A C:H films; H atoms; Optical emission spectroscopy; UV laser ablation

Indexed keywords

CARBON; FILMS; LASER ABLATION; POLYMETHYL METHACRYLATES; SPECTROSCOPY; ULTRAVIOLET RADIATION;

EID: 0031994108     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00281-1     Document Type: Article
Times cited : (7)

References (21)
  • 19
    • 6244296094 scopus 로고
    • and references therein
    • R. Srinivasan, J. Appl. Phys. 73 (1993) 2743 and references therein
    • (1993) J. Appl. Phys. , vol.73 , pp. 2743
    • Srinivasan, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.