Optimal automatic control of multistage production processes

IEEE Transactions on Semiconductor Manufacturing

Volumn 18, Issue 1, 2005, Pages 94-103

  Fenner, Joel S ^a   Jeong, Myong K ^b   Lu, Jye Chyi ^c  

^a INTEL CORPORATION   (United States)

^b University of Tennessee Knoxville   (United States)

^c Georgia Institute of Technology   (United States)

Author keywords

Advanced process control; Data modeling; Dynamic programming; Minimum mean square error control

Indexed keywords

CONTROL EQUIPMENT; DATA STRUCTURES; DYNAMIC PROGRAMMING; ERROR CORRECTION; MATHEMATICAL MODELS; PHOTOLITHOGRAPHY; PROCESS CONTROL;

ADVANCED PROCESS CONTROL; DATA MODELING; MINIMUM MEAN-SQUARE-ERROR CONTROL; MULTISTAGE CONTROLLERS;

OPTIMAL CONTROL SYSTEMS;

EID: 13844255137     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2004.840532     Document Type: Article

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