Overlay measurement: Hidden error

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 400-415

  Gould, Christopher J ^a   Goodwin, Frank ^a   Roberts, William ^a  

^a INFINEON TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING TECHNIQUES; LENSES; MEASUREMENT ERRORS; SCANNING ELECTRON MICROSCOPY;

LENS DISTORTION; OVERLAY MEASUREMENT;

LITHOGRAPHY;

EID: 0033686045     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)