LSI failure analysis using focused laser beam heating

Microelectronics Reliability

Volumn 37, Issue 12, 1997, Pages 1841-1847

  Nikawa, Kiyoshi ^a   Inoue, Shoji ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; FAILURE ANALYSIS; LASER BEAM EFFECTS; THERMAL EFFECTS; VLSI CIRCUITS;

FOCUSED LASER BEAM HEATING;

INTEGRATED CIRCUIT TESTING;

EID: 0031359134     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(97)00017-6     Document Type: Article

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