Femtosecond laser induced forward transfer of materials

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 44-47

  Germain, G ^a   Tsui, Y Y ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Gold; Laser beams; Microelectronics; Micromechanical devices; Morphology; Optical materials; Optical pulses; Prototypes; Substrates; Thin film circuits

Indexed keywords

GOLD; LASER BEAMS; LASER PULSES; MASS TRANSFER; MEMS; MICROELECTRONICS; MORPHOLOGY; OPTICAL MATERIALS; SAPPHIRE; SUBSTRATES; THIN FILM CIRCUITS; THIN FILMS;

LASER-INDUCED FORWARD TRANSFER; MICROELECTRONIC CIRCUITS; MICROMECHANICAL DEVICE; MICROSCOPE OBJECTIVE; PROTOTYPES; RESEARCH APPLICATIONS; THIN FILM MATERIAL; TI:SAPPHIRE LASER SYSTEMS;

LASER MATERIALS PROCESSING;

EID: 13444300613     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1221962     Document Type: Conference Paper

References (12)

1. I. Zergiotti, S. Mailis, N.A. Vainos, P. Papakonstantinou, C. Kaqlpouzos, C.P. Grigoropoulos, C. Fotakis, Microdepsosition of metal and oxide structures using ultrashort laser pulses, Appl. Phys. A 66, 579-582 (1998).
2. S Latsch, H Hiraoka, W Nieveen, J Bargon, Interface Study on laser-induced material transfer from polymer and quartz surfaces,Applied Surface Science 81, 183-194 (1994)
3. Z Toth, T szorenyi, AL Toth, Ar+ laser-induced forward transfer (LIFT): a novel method for micrometer-size surface patterning, Applied Surface Science 69, 317-320 (1993)
4. Z Kantor, Z Toth, T Szorenyi, Metal Pattern deposition by laser-induced forward transfer, Applied Surface Science 196, 196-201 (1995)
5. J Bohandy, BF Kim, FJ Adrian, AN Jette, Metal Deposition at 532nm using a laser transfer technique, Journal of Applied Physics 63(4), 15 feb, 1158-1162 (1988)
6. I Zergioti, S Mailis, NA Vainos, A Ikiades, CP Grigoropoulos, C Fotakis, Microprinting and microetching of diffractive structures using ultrashort laser pulses, Applied Surface Science 138-139, 82 (1999)
7. I. Zergiotti, S. Mailis, N.A. Vainos, P. Papakonstantinou, C. Kaqlpouzos, C.P. Grigoropoulos, C. Fotakis, Microdepsosition of metal and oxide structures using ultrshort laser pulses, Appl. Phys. A 66, 579-582 (1998).
8. P. Papakonstantinou, N.A. Vainos, C. Fotakis, Microfabrication by UV femtosecond laser ablation of Pt, Cr andindium oxide thin films, Applied Surface Science 151, 159-170 (1999)
9. SM Pimenov, GA Shafeev, AA Smolin, VI Konov, BK Vodolaga, Laser-Induced Forward Transfer of ultra-fine diamond particles for selective deposition of diamond films, Applied Surface Science 86, 208-212 (1995)
10. V Schultze, M Wagner, Laser-induced forward transfer of aluminium, Applied Surface Science 52, 303-309 (1991)
11. rd ed., Springer, 2000), 271
12. rd ed., Springer, 2000), Appendix C