Microfabrication by UV femtosecond laser ablation of Pt, Cr and indium oxide thin films

Applied Surface Science

Volumn 151, Issue 3, 1999, Pages 159-170

  Papakonstantinou, P ^a   Vainos, N A ^b   Fotakis, C ^b  

^a UNIVERSITY OF ULSTER   (United Kingdom)

^b INSTITUTE OF COMPUTER SCIENCE   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; DEPOSITION; INDIUM COMPOUNDS; LASER ABLATION; METALLIC FILMS; MICROSTRUCTURE; MORPHOLOGY; PLATINUM; THERMAL DIFFUSION IN SOLIDS; THIN FILMS; ULTRAFAST PHENOMENA; ULTRAVIOLET RADIATION;

MICRODEPOSITION; MICROFABRICATION; MICROPATTERNING; MICROPRINTING;

GLASS;

EID: 0033357547     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00299-8     Document Type: Article

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