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Volumn 44, Issue 4, 2005, Pages 611-619

Quantitative absorption spectroscopy of residual water vapor in high-purity gases: Pressure broadening of the 1.39253-μm H2O transition by N2, HCl, HBr, Cl2, and O2

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ABSORPTION SPECTROSCOPY; CORROSION; FILM GROWTH; PRESSURE EFFECTS; VAPORS; WATER;

EID: 13444256308     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.000611     Document Type: Article
Times cited : (14)

References (39)
  • 1
    • 84893990014 scopus 로고    scopus 로고
    • The international roadmap for semiconductors
    • Sematech, Austin, Tex.
    • Sematech, Inc., The International Roadmap for Semiconductors, ITRS 2003 Ed. 1-39 (Sematech, Austin, Tex., 2003), pp. 1-39; also available at http://public.itrs.net.
    • (2003) ITRS 2003 Ed. 1-39 , pp. 1-39
  • 2
    • 0142134399 scopus 로고    scopus 로고
    • Techniques for the measurement of trace moisture in high-purity electronic specialty gases
    • H. H. Funke, B. L. Grissom, C. E. McGrew, and M. W. Raynor, "Techniques for the measurement of trace moisture in high-purity electronic specialty gases," Rev. Sci. Instrum. 74, 3909-3933 (2003).
    • (2003) Rev. Sci. Instrum. , vol.74 , pp. 3909-3933
    • Funke, H.H.1    Grissom, B.L.2    McGrew, C.E.3    Raynor, M.W.4
  • 3
    • 0037373451 scopus 로고    scopus 로고
    • Detection of trace water in phosphine with cavity ring-down spectroscopy
    • S. Y. Lehman, K. A. Bertness, and J. T. Hodges, "Detection of trace water in phosphine with cavity ring-down spectroscopy," J. of Cryst. Growth 250, 262-268 (2003).
    • (2003) J. of Cryst. Growth , vol.250 , pp. 262-268
    • Lehman, S.Y.1    Bertness, K.A.2    Hodges, J.T.3
  • 4
    • 0036643862 scopus 로고    scopus 로고
    • Influence of MOVPE growth conditions on carbon and silicon concentrations in GaN
    • D. D. Koleske, A. E. Wickenden, R. L. Henry, and M. E. Twigg, "Influence of MOVPE growth conditions on carbon and silicon concentrations in GaN," J. Cryst. Growth 242, 55-69 (2002).
    • (2002) J. Cryst. Growth , vol.242 , pp. 55-69
    • Koleske, D.D.1    Wickenden, A.E.2    Henry, R.L.3    Twigg, M.E.4
  • 6
    • 0035516631 scopus 로고    scopus 로고
    • On the suitability of getter-purified hydrogen for the LP-MOVPE of (AlGa)As: A comparison to Pd-diffused hydrogen
    • H. Hardtdegen, R. Schmidt, K. Wirtz, A. Mueck, S. Guadagnuolo, and G. Vergani, "On the suitability of getter-purified hydrogen for the LP-MOVPE of (AlGa)As: a comparison to Pd-diffused hydrogen," J. Electron. Mater. 30, 1397-1401 (2001).
    • (2001) J. Electron. Mater. , vol.30 , pp. 1397-1401
    • Hardtdegen, H.1    Schmidt, R.2    Wirtz, K.3    Mueck, A.4    Guadagnuolo, S.5    Vergani, G.6
  • 8
    • 13444251817 scopus 로고    scopus 로고
    • Instrumentation for real-time trace impurity detection of bulk ammonia in production environments
    • P. Rosenthal and M. L. Spartz, "Instrumentation for real-time trace impurity detection of bulk ammonia in production environments," Gases Technol. 2(5), 8-12 (2003).
    • (2003) Gases Technol. , vol.2 , Issue.5 , pp. 8-12
    • Rosenthal, P.1    Spartz, M.L.2
  • 9
    • 13444258302 scopus 로고    scopus 로고
    • Parts-per-trillion moisture measurement using cavity ring-down spectroscopy
    • W. Yan, "Parts-per-trillion moisture measurement using cavity ring-down spectroscopy," Gases Technol. 1(4), 21-24 (2002).
    • (2002) Gases Technol. , vol.1 , Issue.4 , pp. 21-24
    • Yan, W.1
  • 10
    • 84894000304 scopus 로고    scopus 로고
    • Description and performance of a tunable laser based absorption analyzer for sub-ppb moisture detection
    • Presented at the San Francisco, Calif., 22-24 July
    • A. Wright, M. Lyons, and C. Wood, "Description and performance of a tunable laser based absorption analyzer for sub-ppb moisture detection," Presented at the SEMICON West 2002 Standards Workshop, San Francisco, Calif., 22-24 July 2002.
    • (2002) SEMICON West 2002 Standards Workshop
    • Wright, A.1    Lyons, M.2    Wood, C.3
  • 11
    • 0010058549 scopus 로고
    • Application of tunable diode laser absorption spectroscopy to trace moisture measurements in gases
    • R. S. Inman and J. J. F. McAndrew, "Application of tunable diode laser absorption spectroscopy to trace moisture measurements in gases," Anal. Chem. 66, 2471-2479 (1994).
    • (1994) Anal. Chem. , vol.66 , pp. 2471-2479
    • Inman, R.S.1    McAndrew, J.J.F.2
  • 12
    • 0001451151 scopus 로고    scopus 로고
    • Wavelength-modulation laser hygrometer for ultra-sensitive detection of water vapor in semiconductor gases
    • D. C. Hovde, J. T. Hodges, G. E. Scace, and J. A. Silver, "Wavelength-modulation laser hygrometer for ultra-sensitive detection of water vapor in semiconductor gases," Appl. Opt. 40, 829-839 (2001).
    • (2001) Appl. Opt. , vol.40 , pp. 829-839
    • Hovde, D.C.1    Hodges, J.T.2    Scace, G.E.3    Silver, J.A.4
  • 13
    • 0028273616 scopus 로고
    • Dynamic dilution calibration system for calibrating analytical instruments used in gas analysis
    • S. N. Ketkar, A. D. Scott, Jr., and J. V. Martinez de Pinillos, "Dynamic dilution calibration system for calibrating analytical instruments used in gas analysis," J. Electrochem. Soc. 141, 184-187 (1994).
    • (1994) J. Electrochem. Soc. , vol.141 , pp. 184-187
    • Ketkar, S.N.1    Scott Jr., A.D.2    De Martinez Pinillos, J.V.3
  • 14
    • 84894001411 scopus 로고    scopus 로고
    • note
    • Manufacturers and product names are listed solely for completeness. These specific citations neither constitute an endorsement of the products nor imply that similar products from other companies would be less suitable.
  • 16
    • 0348046466 scopus 로고    scopus 로고
    • Optimal spectral region for real-time monitoring of sub-ppm levels of water in phosphine using cavity ring-down spectroscopy
    • S. Y. Lehman, K. A. Bertness, and J. T. Hodges, "Optimal spectral region for real-time monitoring of sub-ppm levels of water in phosphine using cavity ring-down spectroscopy," J. of Cryst. Growth 261, 225-230 (2004).
    • (2004) J. of Cryst. Growth , vol.261 , pp. 225-230
    • Lehman, S.Y.1    Bertness, K.A.2    Hodges, J.T.3
  • 17
    • 0038041418 scopus 로고    scopus 로고
    • Periodically locked continuous-wave cavity ringdown spectroscopy
    • N. J. van Leeuwen, J. C. Diettrich, and A. C. Wilson, "Periodically locked continuous-wave cavity ringdown spectroscopy," Appl. Opt. 42, 3670-3677 (2003).
    • (2003) Appl. Opt. , vol.42 , pp. 3670-3677
    • Van Leeuwen, N.J.1    Diettrich, J.C.2    Wilson, A.C.3
  • 19
    • 2042511048 scopus 로고    scopus 로고
    • Frequency-stabilized single-mode cavity ring-down apparatus for high-resolution absorption spectroscopy
    • J. T. Hodges, H. P. Layer, W. M. Miller, and G. E. Scace, "Frequency-stabilized single-mode cavity ring-down apparatus for high-resolution absorption spectroscopy," Rev. Sci. Instrum. 75, 849-863 (2004).
    • (2004) Rev. Sci. Instrum. , vol.75 , pp. 849-863
    • Hodges, J.T.1    Layer, H.P.2    Miller, W.M.3    Scace, G.E.4
  • 20
    • 0032622007 scopus 로고    scopus 로고
    • Pulsed, single-mode cavity ring-down spectroscopy
    • R. D. van Zee, J. T. Hodges, and J. P. Looney, "Pulsed, single-mode cavity ring-down spectroscopy," Appl. Opt. 38, 3951-3960 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 3951-3960
    • Van Zee, R.D.1    Hodges, J.T.2    Looney, J.P.3
  • 21
    • 0021460966 scopus 로고
    • Collisional narrowing effects on spectral line shapes measured at high resolution
    • P. L. Varghese and R. K. Hanson, "Collisional narrowing effects on spectral line shapes measured at high resolution," Appl. Opt. 23, 2376-2385 (1984).
    • (1984) Appl. Opt. , vol.23 , pp. 2376-2385
    • Varghese, P.L.1    Hanson, R.K.2
  • 25
    • 0020884004 scopus 로고
    • 2O using quantum Fourier transform theory
    • 2O using quantum Fourier transform theory," Appl. Opt. 22, 4013-4019 (1983).
    • (1983) Appl. Opt. , vol.22 , pp. 4013-4019
    • Gamache, R.R.1    Davies, R.W.2
  • 26
    • 84975577855 scopus 로고
    • Foreign-gas collision broadening of the far-infrared spectrum of water vapor
    • S. D. Gasster, C. H. Townes, D. Goorvitch, and F. P. J. Valero, "Foreign-gas collision broadening of the far-infrared spectrum of water vapor," J. Opt. Soc. Am. B 5, 593-601 (1988).
    • (1988) J. Opt. Soc. Am. B , vol.5 , pp. 593-601
    • Gasster, S.D.1    Townes, C.H.2    Goorvitch, D.3    Valero, F.P.J.4
  • 29
    • 0001684321 scopus 로고
    • Rayleigh scattering of ruby-laser light by neutral gases
    • R. R. Rudder and D. R. Bach, "Rayleigh scattering of ruby-laser light by neutral gases," J. Opt. Soc. Am. 58, 1260-1266 (1968).
    • (1968) J. Opt. Soc. Am. , vol.58 , pp. 1260-1266
    • Rudder, R.R.1    Bach, D.R.2
  • 30
    • 0032673495 scopus 로고    scopus 로고
    • Collisional broadening of absorption lines in water vapor and atomic iodine relevant to COIL diagnostics
    • in Gas and Chemical Lasers and Intense Beam Applications II, E. A. Dorko, ed.
    • S. J. Davis, W. J. Kessler, and M. Bachmann, "Collisional broadening of absorption lines in water vapor and atomic iodine relevant to COIL diagnostics," in Gas and Chemical Lasers and Intense Beam Applications II, E. A. Dorko, ed., Proc. SPIE 3612, 157-166 (1999).
    • (1999) Proc. SPIE , vol.3612 , pp. 157-166
    • Davis, S.J.1    Kessler, W.J.2    Bachmann, M.3
  • 32
    • 0001564241 scopus 로고    scopus 로고
    • A systematic study of basis set, electron correlation, and geometry effects on the electric multipole moments, polarizability, and hyperpolarizability of HCl
    • G. Maroulis, "A systematic study of basis set, electron correlation, and geometry effects on the electric multipole moments, polarizability, and hyperpolarizability of HCl," J. Chem. Phys. 108, 5432-5448 (1998).
    • (1998) J. Chem. Phys. , vol.108 , pp. 5432-5448
    • Maroulis, G.1
  • 34
    • 13444304732 scopus 로고
    • The effective quadrupole moment of water
    • P. T. Eubank, "The effective quadrupole moment of water," J. Phys. Chem. 77, 2670-2671 (1973).
    • (1973) J. Phys. Chem. , vol.77 , pp. 2670-2671
    • Eubank, P.T.1
  • 35
    • 84945611588 scopus 로고
    • Molecular multiple moments
    • D. E. Stogryn and A. P. Stogryn, "Molecular multiple moments," Mol. Phys. 11, 371-393 (1966).
    • (1966) Mol. Phys. , vol.11 , pp. 371-393
    • Stogryn, D.E.1    Stogryn, A.P.2
  • 36
    • 0006709562 scopus 로고
    • Electric quadrupole moment and quadrupole polarizability of hydrogen bromide
    • G. Maroulis, "Electric quadrupole moment and quadrupole polarizability of hydrogen bromide," J. Phys. B 26, 2957-2964 (1993).
    • (1993) J. Phys. B , vol.26 , pp. 2957-2964
    • Maroulis, G.1
  • 37
    • 0003279527 scopus 로고
    • Electric properties of chlorine
    • G. Maroulis, "Electric properties of chlorine," J. Mol. Struct.: THEOCHEM 98, 79-84 (1993).
    • (1993) J. Mol. Struct.: THEOCHEM , vol.98 , pp. 79-84
    • Maroulis, G.1
  • 38
    • 0000586796 scopus 로고
    • Collision broadening of rotational absorption lines. I. Theoretical formulation
    • J. S. Murphy and J. E. Boggs, "Collision broadening of rotational absorption lines. I. Theoretical formulation," J. Chem. Phys. 47, 691-702 (1967).
    • (1967) J. Chem. Phys. , vol.47 , pp. 691-702
    • Murphy, J.S.1    Boggs, J.E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.