Modeling purity in bulk reactive gas distribution systems

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1997, Pages 351-359

  Verma, Nishith ^a   Athalye, Atul ^a   Precourt, Dennis ^a   Anderson, Nigel ^a  

^a BOC Group   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; DEGASSING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROCHLORIC ACID; IMPURITIES; MOISTURE DETERMINATION; PURIFICATION;

BULK GAS DISTRIBUTION SYSTEMS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031369314     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)