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Journal of Electronic Materials

Volumn 30, Issue 11, 2001, Pages 1397-1401

On the suitability of getter-purified hydrogen for the LP-MOVPE of (AlGa)As: A comparison to Pd-diffused hydrogen

(6) Hardtdegen, H a Schmidt, R a Wirtz, K a Mueck, A a Guadagnuolo, S b Vergani, G b

a FORSCHUNGSZENTRUM JÜLICH (Germany)

b SAES GETTERS S P A (Italy)

Author keywords

(AlGa)As; Carrier gas purification; Hydrogen carrier gas; Low pressure metalorganic vapor phase epitaxy (LP MOVPE)

Indexed keywords

CARRIER CONCENTRATION; DIFFUSION IN GASES; HYDROGEN; METALLORGANIC VAPOR PHASE EPITAXY; OPTICAL PROPERTIES; PALLADIUM; PURIFICATION;

CARRIER GAS PURIFICATION;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0035516631 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-001-0190-0 Document Type: Article

Times cited : (2)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.