Diffusion in polymer-derived Si-(B-)C-N ceramics, particularly amorphous Si29B9C41N21

Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques

Volumn 94, Issue 4, 2003, Pages 419-423

  Voss, Thilo ^a   Strohm, Andreas ^a   Frank, Werner ^a,b  

^a UNIVERSITY OF STUTTGART   (Germany)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

Diffusion mechanisms; Diffusion of 71Ge, 31Si, and 11C; Polymer derived amorphous ceramic Si29B9C41N21; Radiotracer techniques

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CARBON; CERAMIC MATERIALS; CRYSTAL STRUCTURE; DIFFUSION IN SOLIDS; GERMANIUM; ION IMPLANTATION; POLYMERS; PYROLYSIS; RADIOISOTOPES; SILICON;

ARRHENIUS PARAMETERS; DIFFUSION MECHANISM; ION BEAM SPUTTERING; POLYMER DERIVED AMORPHOUS CERAMIC SILICON CARBON BORON NITRIDE; PRE-ANNEALING; RADIOTRACER TECHNIQUES;

SILICON COMPOUNDS;

EID: 1342263748     PISSN: 00443093     EISSN: None     Source Type: Journal    
DOI: 10.3139/146.030419     Document Type: Article

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