Fabrication of photonic crystal waveguides composed of a square lattice of dielectric rods

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3363-3365

  Assefa, Solomon ^a   Petrich, G S ^a   Kolodziejski, L A ^a   Mondol, M K ^a   Smith, H I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC RODS; HYDROGEN SILSESQUIOXANE (HSQ); PHOTONIC BAND GAP (PBG); PHOTONIC CRYSTAL WAVEGUIDES;

ASPECT RATIO; CRYSTAL LATTICES; CRYSTALS; DIELECTRIC MATERIALS; ELECTRON BEAM LITHOGRAPHY; MOLECULAR BEAM EPITAXY; NEGATIVE RESISTANCE; PHOTONS; PHOTORESISTS; POLYMETHYL METHACRYLATES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

OPTICAL WAVEGUIDES;

EID: 13244270226     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1821573     Document Type: Conference Paper

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