Lithographically directed deposition of silica nanoparticles using spin coating

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3415-3420

  Xia, Deying ^a   Brueck, S R J ^a  

^a University of New Mexico   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COLLOIDAL CRYSTALS; ELECTROSTATIC DEPOSITION; SILICA NANOPARTICLES; SURFACE PATTERNING;

DEPOSITION; ELECTRON BEAM LITHOGRAPHY; ELECTROSTATICS; MASKS; NANOSTRUCTURED MATERIALS; PHOTOLITHOGRAPHY; PHOTORESISTS; SELF ASSEMBLY; SILICA;

LITHOGRAPHY;

EID: 13244259609     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1821582     Document Type: Conference Paper

References (19)

1. Y. Xia, B. Gates, Y. Yin, and Y. Lu, Adv. Mater. (Weinheim, Ger.) 12, 693 (2000).
2. G. A. Ozin and S. M. Yang, Adv. Funct. Mater. 11, 95 (2001).
3. M. Glazer, J. Fidanza, G. McGall, and C. Frank, Chem. Mater. 13, 4773 (2001).
4. R. Moller, A. Csaki, J. M. Kohler, and W. Fritzsche, Langmuir 17, 5426 (2001).
5. F. J. Castano, Y. Hao, M. Hwang, C. A. Ross, B. Vogeli, H. I. Smith, and S. Haratani, Appl. Phys. Lett. 79, 1504 (2001).
6. J. O'Brien II, P. Bisong, L. K. Ista, E. M. Rabinovich, A. L. Garcia, S. S. Sibbett, G. P. Lopez, and S. R. J. Brueck, J. Vac. Sci. Technol. B 21, 2941 (2003).
7. V. Kitaev and G. A. Ozin, Adv. Mater. (Weinheim, Ger.) 15, 75 (2003).
8. X. Wang, C. J. Summers, and Z. L. Wang, Nano Lett. 4, 423 (2004).
9. A. van Blaaderen, R. Ruel, and P. Wiltzius, Nature (London) 385, 321 (1997).
10. D. Xia A. Biswas, D. Li, and S. R. J. Brueck, Adv. Mater. (Weinheim, Ger.) 16, 1427 (2004).
11. D. Wang and H. Mohwald, Adv. Mater. (Weinheim, Ger.) 16, 244 (2004).
12. J. Zhang, A. Alsayed, K. H. Lin, S. Sanyal, F. Zhang, W. J. Pao, V. S. Balagurusamy, P. A. Heiney, and A. G. Yoah, Appl. Phys. Lett. 81, 3176 (2002).
13. Y. Cui, M. T. Björk, J. A. Liddle, C. Sönnichsen, B. Boussert, and A. P. Alivisatos, Nano Lett. 4, 1093 (2004).
14. H. Zheng, I. Lee, M. F. Rubner, and P. T. Hammond, Adv. Mater. (Weinheim, Ger.) 14, 569 (2002).
15. P. Jiang, J. F. Bertone, and V. L. Colvin, Science 291, 453 (2001).
16. X. Chen, S. H. Zaidi, S. R. J. Brueck, and D. Devine, J. Vac. Sci. Technol. B 14, 3339 (1996).
17. S. H. Im, M. H. Kim, and O. O. Park, Chem. Mater. 15, 1797 (2003).
18. Y. Yin, Y. Lu, B. Gates, and Y. Xia, J. Am. Chem. Soc. 123, 8718 (2001).
19. D. Xia and S. R. J. Brueck, Nano Lett. 4, 1295 (2004).