Properties and application of jet printed piezoelectric PZT film for actuation purposes

MHS 1997 - Proceedings of 1997 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1997, Pages 67-72

  Schroth, A ^a,b   Ichiki, M ^a   Akedo, J ^a   Tanaka, M ^a,b   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Micromachine Center   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; PIEZOELECTRICITY;

BEAM DEFLECTION; FUNCTIONAL ELEMENTS; JET PRINTING; LASER MEASUREMENTS; PIEZOELECTRIC ACTUATION; PIEZOELECTRIC CONSTANT; PIEZOELECTRIC THIN FILMS; RELATIVE DIELECTRIC CONSTANT;

THIN FILMS;

EID: 12444325282     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.1997.768859     Document Type: Conference Paper

References (7)

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2. J. Akedo, M. Ichiki, K. Kikuchi, R. Maeda: New Molding Technique Using Ultra-Fine Particles for Realization of Three Dimensional Micro Structure, T.JEE Japan, Vol. 117-E, No. 8 (1997), pp. 432-433.
3. M. Ichiki, J. Akedo, A. Schroth, R. Maeda, Y. Ishikawa: X-ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method, Jpn. J. Apl. Phys., 9B, Vol. 36 (1997), in print.
4. H. Adachi, Y. Kuroda, T. Imahashi, K. Yanagisawa: Preparation of Piezoelectric Thick Film using a Jet Printing System, Jpn. J. Apl. Phys., Parti, No. 3A, March 1997, Vol. 36 (1997), pp. 1159-1163.
5. A. Schroth: Methods of Description and Models for the Behaviour of Beams or Plates as Mechanical Transducer Elements in Micromechanics, Thesis, Dresden University of Technology, Germany (1996) (in German).
6. H. Schaumburg (ed.): Sensoren, B. G. Teubner, Stuttgart, (1992) (in German).
7. C. Iee: Piezoelectric PZT Thin Film Synthesized by Sol-gel Method and Its Application to Micromachined Force Sensors for Scanning Force Microscope, Ph. D. Thesis, The University of Tokyo, Japan (1996).