High-density DLC films prepared using a magnetron sputter type negative ion source

Diamond and Related Materials

Volumn 14, Issue 2, 2005, Pages 196-200

  Paik, Namwoong ^a  

^a Plasmion Corporation   (United States)

Author keywords

Cathode voltage; Diamond like carbon; Magnetron sputter type negative ion source

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; GIANT MAGNETORESISTANCE; MAGNETRON SPUTTERING; NEGATIVE IONS; POSITIVE IONS; SURFACE ROUGHNESS; THICK FILMS;

CARBON FILMS; CATHODE VOLTAGE; MAGNETRON SPUTTER TYPE ION SOURCE; X-RAY REFLECTIVITY;

DIAMOND LIKE CARBON FILMS;

EID: 12444288002     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.11.005     Document Type: Article

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