Diamond-like carbon films prepared by filtered arc deposition for electron field emission application

Surface and Coatings Technology

Volumn 137, Issue 1, 2001, Pages 1-5

  Mao, D S ^a   Li, W ^a   Wang, X ^a   Liu, X H ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Diamond like carbon; Electron field emmission; Filtered are deposition; Reactive ion beam etching

Indexed keywords

DEPOSITION; ELECTRIC FIELD EFFECTS; ELECTRON EMISSION; FILM PREPARATION;

ELECTRON FIELD EMISSION; FILTERED ARC DEPOSITION;

DIAMOND LIKE CARBON FILMS;

DEPOSITION; DIAMOND-LIKE CARBON; DIAMOND-LIKE COATING; ETCHING; FILM; LUBRICATION SYSTEM;

EID: 0035062213     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01078-1     Document Type: Article

References (18)