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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 12, 2003, Pages 7580-7584

Extension of Atomic Mixing, Surface Roughness and Information Depth Model for Auger Electron Spectroscopy Sputter-Depth Profile Using Tilted Cylindrical Mirror Analyzer

(4) Bungo, Takuya a Mizuhara, Yuzuru a Nagatomi, Takaharu a Tarai, Yoshizo a

a OSAKA UNIVERSITY (Japan)

Author keywords

AES sputter depth profiling; Low energy ion; MRI model; Tilted CMA

Indexed keywords

ATOMIC PHYSICS; AUGER ELECTRON SPECTROSCOPY; CYLINDERS (SHAPES); ION BOMBARDMENT; MIRRORS; OPTICAL RESOLVING POWER; PARAMETER ESTIMATION; POSITIVE IONS; SPUTTERING; SUPERLATTICES; SURFACE ROUGHNESS;

AUGER ELECTRON SPECTROSCOPY (AES) SPUTTER-DEPTH PROFILING; LOW-ENERGY ION; MAGNETIC RESONANCE IMAGING (MRI) MODELS; TILTED CYLINDRICAL MIRROR ANALYZER (CMA);

MAGNETIC RESONANCE IMAGING;

EID: 1242332793 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.7580 Document Type: Article

Times cited : (8)

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