Floating-type compact low-energy ion gun - basic performance for high-resolution depth profiling

Shinku/Journal of the Vacuum Society of Japan

Volumn 43, Issue 12, 2000, Pages 1126-1128

  Matsutani, Takaomi ^a   Iwamoto, Keigo ^a   Nagatomi, Takaharu ^a   Kimura, Yoshihide ^a   Takai, Yoshizo ^a   Shimizu, Ryuichi ^a   Aihara, Ryuzo ^a   Sakuma, Yoshizo ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRON ENERGY LEVELS; IMPACT IONIZATION; MAGNETIC FIELD EFFECTS; MAGNETIC LENSES; PERMANENT MAGNETS; SURFACE PROPERTIES;

CURRENT INTENSITY; EXTRACTOR; FLOATING TYPE LOW ENERGY ION GUN; IMMERSION LENS; IONIZATION CELL; SURFACE ANALYTICAL INSTRUMENTS;

ION SOURCES;

EID: 0034459173     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.43.1126     Document Type: Article

References (6)