Novel floating-type low-energy ion gun for high-resolution depth profiling in ultrahigh vacuum

Surface and Interface Analysis

Volumn 35, Issue 4, 2003, Pages 382-386

  Mizuhara, Y ^a   Kato, J ^a   Nagatomi, T ^a   Takai, Y ^a   Aoyama, T ^b   Yoshimoto, A ^b   Inoue, M ^b   Shimizu, R ^c  

^a OSAKA UNIVERSITY   (Japan)

^b SETSUNAN UNIVERSITY   (Japan)

^c OSAKA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

High resolution depth profiling; Low energy ion; Ultrahigh vacuum floating type low energy ion gun

Indexed keywords

ARGON; AUGER ELECTRON SPECTROSCOPY; CURRENT DENSITY; ION SOURCES; SPUTTERING; ULTRAHIGH VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

FLOATING-TYPE LOW-ENERGY ION GUNS (FLIG);

PROFILOMETRY;

EID: 0037389621     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1545     Document Type: Article

References (13)

1. Papers from the Fourth International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors. J. Vac. Sci. Technol. 1998; B16: 257.
2. Clegg JB. J. Vac. Sci. Technol. 1995; A13: 143.
3. Andersen HH. Appl. Phys. 1979; 18: 131.
4. Wittmaack K. Vacuum 1984; 34: 119.
5. Dowsett MG, Smith NS, Bridgeland R, Richards D, Lovejoy AC, Pedrick P. In Proceedings of the Tenth International Conference on Secondary Ion Mass Spectrometry (SIMS-X), Benninghoven A, Hagenhoff B, Werner HW (eds). John Wiley: Chichester, 1997; 367.
6. Smith NS, Dowsett MG, McGregor B, Phillips P. In Proceedings of the Tenth International Conference on Secondary Ion Mass Spectrometry (SIMS-X), Benninghoven A, Hagenhoff B, Werner HW (eds). John Wiley: Chichester, 1997; 363.
7. Matsutani T, Iwamoto K, Nagatomi T, Kimura Y, Takai Y, Shimizu R, Aihara R, Sakuma Y. J. Vac. Soc. Jpn. 2000; 43: 1126.
8. Shimizu R, Yamauchi Y, Nishihara S, Hashimoto H. Technol. Rep. Osaka Univ. 1984; 34:175.
9. Nishihara S, Shimizu R, Yamauchi Y. In Proceedings of the Ninth Symposium on Ion Sources and Ion-Assisted Technology, Takagi T (ed.). Ionics: Tokyo, 1985; 543.
10. Shimizu R. Surf. Interface Anal. 1988; 11: 510.
11. Matsunami N, Yamamura Y, Itikawa Y, Itoh N, Kazumata Y, Miyagawa S, Morita K, Shimizu R, Tawara H. At. Data Nucl. Data Tables 1984; 31:1.
12. Lee HI, Mitsuhashi R, Inoue M, Shimizu R, Hofmann S. Jpn, J. Appl Phys. 1995; 34: L1010.
13. Homma Y, Takenaka H, Hayashi S, Goto K, Inoue M, Shimizu R. Presented at China-japan Joint Seminar on Atomic level Characterization - 2002, Guilin, China, 4-8 November, 2002 (to be published in a special issue of Surf. Interface Anal).