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Volumn 263, Issue 1-4, 2004, Pages 21-24
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Self-assembled SiGe islands with uniform shape and size by controlling Si concentration in islands
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Author keywords
A1. Si concentration; A1. Strain energy; A3. Self assembled SiGe islands
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL GROWTH;
CRYSTAL ORIENTATION;
HEAT FLUX;
SELF ASSEMBLY;
SIZE DETERMINATION;
STRAIN;
ULTRAHIGH VACUUM;
SELF-ASSEMBLED SIGE ISLANDS;
SI CONCENTRATION;
STRAIN ENERGY;
SILICON COMPOUNDS;
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EID: 1242331386
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2003.10.091 Document Type: Article |
Times cited : (9)
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References (10)
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