Multilayer technique for fabricating Nb junction circuits exhibiting charging effects

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 1, 1999, Pages 230-232

  Pavolotsky, A B ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006373981     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590504     Document Type: Article

References (13)

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